"This book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. It contains the newest experimental and technological information about ceramic thin films, a key technology for nanomaterials in high-speed information applications and large-area functional coatings. This book is an invaluable resource for scientists, engineers, and graduate students in the semiconductor, energy, environment, vehicle, medical, and food industries."--BOOK JACKET.