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Handbook of sputter deposition technology

  • Kiyotaka Wasa

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Genres

  • Cathode sputtering (Plating process)
  • Thin films
  • Nanostructured materials
  • Sputtering (physics)
  • Handbooks, manuals
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About the author

  • Kiyotaka Wasa

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    0 ratings · 5 works

Editions

  • Edition cover

    Elsevier Science & Technology Books, William Andrew

    2012

  • Edition cover

    Noyes Publications

    1992

  • Edition cover

    Elsevier Science & Technology Books

    2012

  • Edition cover

    Elsevier Science & Technology Books

    1992