Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
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Genres
- Polishing
- Semiconductors
- Grinding and polishing
- Interconnects (Integrated circuit technology)
- Plastics & polymers technology
- Science/Mathematics
- Integrated Circuits
- Technology
- Technology & Industrial Arts
- Chemistry - Organic
- Electronics - Semiconductors
- Engineering - Electrical & Electronic
- Science-Chemistry - Organic
- Technology / Electronics / Semiconductors
- Technology / Engineering / Industrial
- Technology-Engineering - Electrical & Electronic
- Electronics - Circuits - Integrated
- Interconnects (Integrated circ
- Chemical mechanical planarization
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